Australian National Fabrication Facility

ANFF NSWThe Australian National Fabrication Facility (ANFF) provides Australian researchers from the public and private sectors access to state-of-the-art fabrication facilities. The NSW Node (known as the 'ANFF NSW') is one of eight Nodes within the national network, and is located at UNSW’s Kensington campus.

Researchers can access advanced nanofabrication capability, including specialised training programs, via open access cleanrooms and laboratory spaces.

ANFF NSW has been awarded over $12 million in Federal government funding and over $3 million in State government funding since ANFF was established under the National Collaborative Research Infrastructure Strategy (NCRIS) in 2007.

Around 250 researchers make use of the ANFF NSW laboratories each year. Researchers come from a range of disciplines including electronics, quantum technologies, photonics, clean energy technologies, biomedical devices and medical sensor technologies.

Key capabilities

At the heart of the ANFF NSW laboratories are three electron beam lithography systems, all capable of producing sub-20nm device features. This capability is supported by a full Si-MOS process line (high temperature furnaces; photolithography; a range of deposition and etching tools; and dicing, packaging and bonding capability) as well as additional tools allowing MOS-incompatible processes to run in parallel. The Node also operates a suite of molecular beam epitaxy systems producing ultra-low-disorder III-V heterostructure material as well as a wide range of high quality complex oxide layers and nanocomposites.

One of the key services provided by ANFF NSW is the provision of advanced nanofabrication training for research students and staff. Training programs are customised to suit each researcher’s individual project requirements and are most often delivered in one-on-one sessions with ANFF NSW process engineers. ANFF NSW staff are also available to perform processing and development work on behalf of researchers.

Further information about the ANFF NSW facility can be found here.