Nano/Micro Systems

The Nano/Micro Systems Research Group conducts research over a diverse range of disciplines, covering devices from the nanometer scale to several hundreds of microns.

Broadly speaking, research interest in the group includes silicon based quantum computing, Si nanoelectronics, MEMS based optical interconnects, RF MEMS, low power integrated circuit design for biomedical applications and ultra-low temperature electronics.

A key research facility for the Microsystems research group is the UNSW mode of the Australian National Fabrication Facility (ANFF).

Established under the National Collaborative Research Infrastructure Strategy, the Australian National Fabrication Facility (ANFF) links 8 university-based nodes to provide researchers

and industry with access to state-of-the-art fabrication facilities. The UNSW node Director is Prof Andrew Dzurak.

The group also contributes significantly to the Australian Centre of Excellence for Quantum Computation and Communication Technology (CQC2T).